Deposition of large area, directly textured, ZnO:Al films by reactive-environment, hollow cathode sputtering

A. M. Patel, S. Y. Guo, A. P. Stavrides, J. A. Cambridge, L. T. Le, H. Efstathiadis, P. Haldar, A. E. Delahoy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Aluminum-doped zinc oxide (ZnO:Al) is a promising transparent conducting oxide (TCO) for the second generation, thin film based solar cells. Moderately large area, directly textured ZnO:Al films were successfully deposited by reactive-environment, hollow cathode sputtering (RE-HCS) using metal targets. The morphology, structural, electrical, and optical properties of the films have been investigated and comparisons are made with the properties of commercially available textured SnO2:F. Higher haze and reduced absorption could be obtained with the textured ZnO:Al films. Besides the textured surface, these films (∼1030nm thick) also have a low sheet resistance of 2.8 ohms/square. Hall effect measurements on these films yielded a record high mobility of 49.5 cm2/V-s and carrier concentration of 4.42 × 1020 cm-3. The use of these textured ZnO:Al films as a TCO for single junction a-Si cells resulted in increased Voc, Jsc, and FF. The novel deposition method of RE-HCS provides a possible and promising pathway to a relatively low cost, large area production process for a textured ZnO TCO for thin-film PV manufacturing.

Original languageEnglish (US)
Title of host publication33rd IEEE Photovoltaic Specialists Conference, PVSC 2008
DOIs
StatePublished - Dec 1 2008
Event33rd IEEE Photovoltaic Specialists Conference, PVSC 2008 - San Diego, CA, United States
Duration: May 11 2008May 16 2008

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371

Other

Other33rd IEEE Photovoltaic Specialists Conference, PVSC 2008
CountryUnited States
CitySan Diego, CA
Period5/11/085/16/08

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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