Deposition schemes for low cost transparent conductors for photovoltaics

A. E. Delahoy; M. Cherny

doi:10.1557/proc-426-467

Deposition schemes for low cost transparent conductors for photovoltaics

A. E. Delahoy, M. Cherny

Research output: Contribution to journal › Conference article › peer-review

44 Scopus citations

Abstract

Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m² substrates by bipolar, reactive sputtering from ZnO:Al₂O₃ targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study the state of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

Original language	English (US)
Pages (from-to)	467-477
Number of pages	11
Journal	Materials Research Society Symposium - Proceedings
Volume	426
DOIs	https://doi.org/10.1557/proc-426-467
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA Duration: Apr 8 1996 → Apr 12 1996

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Deposition schemes for low cost transparent conductors for photovoltaics",

abstract = "Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study the state of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.",

author = "Delahoy, {A. E.} and M. Cherny",

year = "1996",

doi = "10.1557/proc-426-467",

language = "English (US)",

volume = "426",

pages = "467--477",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1996 MRS Spring Symposium ; Conference date: 08-04-1996 Through 12-04-1996",

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AU - Delahoy, A. E.

AU - Cherny, M.

PY - 1996

Y1 - 1996

N2 - Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study the state of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

AB - Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study the state of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

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U2 - 10.1557/proc-426-467

DO - 10.1557/proc-426-467

M3 - Conference article

AN - SCOPUS:0030411048

SN - 0272-9172

VL - 426

SP - 467

EP - 477

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Spring Symposium

Y2 - 8 April 1996 through 12 April 1996

ER -

Deposition schemes for low cost transparent conductors for photovoltaics

Abstract

All Science Journal Classification (ASJC) codes

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