Deposition schemes for low cost transparent conductors for photovoltaics

A. E. Delahoy, M. Cherny

Research output: Contribution to journalConference articlepeer-review

43 Scopus citations

Abstract

Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study the state of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

Original languageEnglish (US)
Pages (from-to)467-477
Number of pages11
JournalMaterials Research Society Symposium - Proceedings
Volume426
DOIs
StatePublished - 1996
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 8 1996Apr 12 1996

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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