Deposition schemes for low cost transparent conductors for photovoltaics

Keyphrases

• Alloy Target 50%
• Deposition Conditions 50%
• Magnetron Sputtering 50%
• Optical Emission 50%
• Process Optimization 50%
• Production Requirements 50%
• Reactive Sputtering 100%
• Spatial Dependence 50%
• Sputtered Zinc Oxide 50%
• Sputtering Target 50%
• Thin-film Photovoltaics 50%
• Transparent Conductor 100%
• Zn-Al 50%
• ZnO-Al2O3 50%

Material Science

• Al2O3 50%
• Cathode 50%
• Photovoltaics 100%
• Thin Films 50%
• Transparent Conducting Film 100%
• Zinc Oxide 50%
• ZnO 100%

Chemical Engineering

• Reactive Sputtering 100%
• Zinc Oxide 50%