Design and fabrication of heated microchannels

Keyphrases

• Heater 100%
• Sample Preparation 50%
• Silicon Substrate 50%
• On-a-chip 50%
• Response Time 50%
• Metal Film 50%
• Photolithography 50%
• Surface Temperature 50%
• Aluminum Alloy 50%
• Heat Transfer Model 50%
• Metal Deposition 50%
• Temperature Cycling 50%
• Chemical Etching 50%
• Maximum Temperature 50%
• Conducting Layer 50%
• Miniature Sensor 50%
• Microheater 50%
• Excellent Long-term Stability 50%
• Resistive Heater 50%

Material Science

• Silicon 100%
• Metal Film 100%
• Oxidation Reaction 100%
• Aluminum Alloys 100%
• Metal Deposition 100%
• Wet Etching 100%

Engineering

• Microchannel 100%
• Microscale 33%
• Silicon Substrate 33%
• Optical Lithography 33%
• Response Time 33%
• Term Stability 33%
• Resistive 33%
• Heat Transfer Model 33%
• Maximum Temperature 33%