Design of an ultralow coverage metal evaporator based on a geometric factor

K. K. Chin; P. McKernan; I. Lindau

doi:10.1116/1.573755

Design of an ultralow coverage metal evaporator based on a geometric factor

K. K. Chin, P. McKernan, I. Lindau

Research output: Contribution to journal › Letter › peer-review

8 Scopus citations

Abstract

An ultralow coverage eight-metal evaporator has been designed, built, tested, and put into use. Based on a geometric factor of 1:200, a metal coverage as low as 10^–4 monolayer is reproducibly obtained with an error in coverage less than 20%. Various considerations during the design of the evaporator are discussed.

Original language	English (US)
Pages (from-to)	1949-1951
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	4
DOIs	https://doi.org/10.1116/1.573755
State	Published - Jul 1986
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.573755

Cite this

@article{368b0ac6c455473b88ac46fd43a3fd68,

title = "Design of an ultralow coverage metal evaporator based on a geometric factor",

abstract = "An ultralow coverage eight-metal evaporator has been designed, built, tested, and put into use. Based on a geometric factor of 1:200, a metal coverage as low as 10–4 monolayer is reproducibly obtained with an error in coverage less than 20%. Various considerations during the design of the evaporator are discussed.",

author = "Chin, {K. K.} and P. McKernan and I. Lindau",

year = "1986",

month = jul,

doi = "10.1116/1.573755",

language = "English (US)",

volume = "4",

pages = "1949--1951",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Design of an ultralow coverage metal evaporator based on a geometric factor

AU - Chin, K. K.

AU - McKernan, P.

AU - Lindau, I.

PY - 1986/7

Y1 - 1986/7

N2 - An ultralow coverage eight-metal evaporator has been designed, built, tested, and put into use. Based on a geometric factor of 1:200, a metal coverage as low as 10–4 monolayer is reproducibly obtained with an error in coverage less than 20%. Various considerations during the design of the evaporator are discussed.

AB - An ultralow coverage eight-metal evaporator has been designed, built, tested, and put into use. Based on a geometric factor of 1:200, a metal coverage as low as 10–4 monolayer is reproducibly obtained with an error in coverage less than 20%. Various considerations during the design of the evaporator are discussed.

UR - http://www.scopus.com/inward/record.url?scp=84930203231&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84930203231&partnerID=8YFLogxK

U2 - 10.1116/1.573755

DO - 10.1116/1.573755

M3 - Letter

AN - SCOPUS:84930203231

SN - 0734-2101

VL - 4

SP - 1949

EP - 1951

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Design of an ultralow coverage metal evaporator based on a geometric factor

Abstract

All Science Journal Classification (ASJC) codes

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