Diaphragm design guidelines and an optical pressure sensor based on MEMS technique

Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry T. Roman, Ken K. Chin, Kenneth R. Farmer

Research output: Contribution to journalArticlepeer-review

65 Scopus citations

Abstract

The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency. According to the study, the thickness need to be thin and the side length need to be small in order to get the sensitive diaphragm with high resonant frequency. A Fabry-Perot based pressure sensor has been designed based on the guidelines, fabricated and characterized. In principle, the sensor is made according to Fabry-Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. The experimental results show that the sensor has a very high sensitivity of 28.6 mV/Pa, resolution of 2.8 Pa, and up to 91 kHz dynamic response.

Original languageEnglish (US)
Pages (from-to)50-56
Number of pages7
JournalMicroelectronics Journal
Volume37
Issue number1
DOIs
StatePublished - Jan 2006

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Keywords

  • Diaphragm design
  • Fabry-Perot
  • MEMS
  • Pressure sensor

Fingerprint

Dive into the research topics of 'Diaphragm design guidelines and an optical pressure sensor based on MEMS technique'. Together they form a unique fingerprint.

Cite this