TY - GEN
T1 - Dielectric properties of BST/ (Y2O3) x(ZrO2)1-x/ BST trilayer films
AU - Sahoo, Santosh K.
AU - Misra, D.
N1 - Funding Information:
The authors would like to thank for the support from National Renewable Energy Laboratory, Colorado, USA and New Jersey Institute of Technology, New Jersey, USA.
PY - 2011
Y1 - 2011
N2 - Thin films of Ba1-xSrxTiO3 (BST) are being actively investigated for applications in dynamic random access memories (DRAM) because of their properties such as high dielectric constant, low leakage current, and high dielectric breakdown strength. Various approaches have been used to improve the dielectric properties of BST thin films such as doping, graded compositions, and multilayer structures. We have found that inserting a ZrO2 layer in between two BST layers results in a significant reduction in dielectric constant as well as dielectric loss. In this work the effect of Y2O3 doped ZrO2 on the dielectric properties of BST/ ZrO2/ BST trilayer structure is studied. The structure Ba0.8Sr0.2TiO3/ (Y2O 3)x(ZrO2)1-x/ Ba 0.8Sr0.2TiO3 is deposited by a sol-gel process on platinized Si substrate. The composition (x) of the middle layer is varied while keeping the total thickness of the trilayer film constant. The dielectric constant of the multilayer film decreases with the increase of Y 2O3 amount in the film whereas there is a slight variation in dielectric loss. In Y2O3 doped multilayer thin films, the dielectric loss is lower in comparison to other films and also there is good frequency stability in the loss in the measured frequency range and hence very suitable for microwave device applications.
AB - Thin films of Ba1-xSrxTiO3 (BST) are being actively investigated for applications in dynamic random access memories (DRAM) because of their properties such as high dielectric constant, low leakage current, and high dielectric breakdown strength. Various approaches have been used to improve the dielectric properties of BST thin films such as doping, graded compositions, and multilayer structures. We have found that inserting a ZrO2 layer in between two BST layers results in a significant reduction in dielectric constant as well as dielectric loss. In this work the effect of Y2O3 doped ZrO2 on the dielectric properties of BST/ ZrO2/ BST trilayer structure is studied. The structure Ba0.8Sr0.2TiO3/ (Y2O 3)x(ZrO2)1-x/ Ba 0.8Sr0.2TiO3 is deposited by a sol-gel process on platinized Si substrate. The composition (x) of the middle layer is varied while keeping the total thickness of the trilayer film constant. The dielectric constant of the multilayer film decreases with the increase of Y 2O3 amount in the film whereas there is a slight variation in dielectric loss. In Y2O3 doped multilayer thin films, the dielectric loss is lower in comparison to other films and also there is good frequency stability in the loss in the measured frequency range and hence very suitable for microwave device applications.
UR - http://www.scopus.com/inward/record.url?scp=80053195711&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80053195711&partnerID=8YFLogxK
U2 - 10.1557/opl.2011.151
DO - 10.1557/opl.2011.151
M3 - Conference contribution
AN - SCOPUS:80053195711
SN - 9781605112695
T3 - Materials Research Society Symposium Proceedings
SP - 9
EP - 13
BT - Oxide Nanoelectronics
T2 - 2010 MRS Fall Meeting
Y2 - 29 November 2010 through 3 December 2010
ER -