Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing

Mu Der Jeng; Mengchu Zhou

doi:10.1109/TSM.1998.705369

Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing

Mu Der Jeng, Mengchu Zhou

Electrical and Computer Engineering

Research output: Contribution to journal › Comment/debate › peer-review

2 Scopus citations

Original language	English (US)
Pages (from-to)	330-332
Number of pages	3
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	11
Issue number	3
DOIs	https://doi.org/10.1109/TSM.1998.705369
State	Published - Aug 1998

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/TSM.1998.705369

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title = "Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing",

author = "Jeng, \{Mu Der\} and Mengchu Zhou",

year = "1998",

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pages = "330--332",

journal = "IEEE Transactions on Semiconductor Manufacturing",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

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Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing

All Science Journal Classification (ASJC) codes

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