Effect of annealing temperature on microstructure and magnetism of FePt/TaOx bilayer

Guijun Li, Chi Wah Leung, Ying Ching Chen, Ko Wei Lin, An Cheng Sun, Jen Hwa Hsu, Philip W.T. Pong

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


The effect of annealing temperatures on the microstructures and magnetism of FePt/TaOx bilayers was systemically investigated in the range of 25-650 °C. Microstructural characterization reveals that higher annealing temperatures lead to higher ordering parameters and larger grain sizes. High order parameter up to 0.57 was acquired after the sample was annealed at 600 °C. Diffusion was observed from TaOx layer into FePt layer after annealing at temperature over 550 °C. The out-of-plane coercivity first increased and exhibited a maximum value up of 4.2 kOe after annealing at 550 °C and decreased as the annealing temperature was further increased. The coercivity increase with higher annealing temperature was attributed to the rise of magnetocrystalline anisotropy due to the formation of the ordered fct FePt structures.

Original languageEnglish (US)
Pages (from-to)241-245
Number of pages5
JournalMicroelectronic Engineering
StatePublished - 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


  • Annealing temperature
  • Coercivity
  • FePt


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