Abstract
CdS thin films were deposited on the substrate at temperature of 300°C by magnetron sputtering. The deposited films were annealed at temperature of 370°C, 380°C and 390°C, respectively, in either atmosphere of dry air or a mixture of CdCl2 and dry air. The morphology, structure and optical properties before and after thermal annealing were investigated. The results show that for samples annealed in dry air, the variations of grain size, surface roughness and visible light transmittance with annealing temperature are not obvious, while the optical band gap increases with temperature increasing. Annealed in the mixture of CdCl2 and dry air, recrystallization and grain growth in the samples are significant. Surface roughness increases with temperature increasing, on the contrary, visible light transmittance and optical band gap decreases. These phenomena are the results of changes in the temperature of recrystallization and doping concentration in the band tail states at different annealing atmosphere.
Original language | English (US) |
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Pages (from-to) | 298-303 |
Number of pages | 6 |
Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
Volume | 32 |
Issue number | 4 |
DOIs | |
State | Published - Aug 2013 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
Keywords
- Annealing
- Band tail states
- CdS thin film
- Magnetron sputtering
- Recrystallization