Effect of different annealing conditions on the properties of CdS thin films deposited by magnetron sputtering

Chuan Jun Zhang, Yun Hua Wu, Hong Cao, Shou Ren Zhao, Shan Li Wang, Jun Hao Chu

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


CdS thin films were deposited on the substrate at temperature of 300°C by magnetron sputtering. The deposited films were annealed at temperature of 370°C, 380°C and 390°C, respectively, in either atmosphere of dry air or a mixture of CdCl2 and dry air. The morphology, structure and optical properties before and after thermal annealing were investigated. The results show that for samples annealed in dry air, the variations of grain size, surface roughness and visible light transmittance with annealing temperature are not obvious, while the optical band gap increases with temperature increasing. Annealed in the mixture of CdCl2 and dry air, recrystallization and grain growth in the samples are significant. Surface roughness increases with temperature increasing, on the contrary, visible light transmittance and optical band gap decreases. These phenomena are the results of changes in the temperature of recrystallization and doping concentration in the band tail states at different annealing atmosphere.

Original languageEnglish (US)
Pages (from-to)298-303
Number of pages6
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Issue number4
StatePublished - Aug 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


  • Annealing
  • Band tail states
  • CdS thin film
  • Magnetron sputtering
  • Recrystallization


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