Fingerprint
Dive into the research topics of 'Effect of post plasma oxidation on Ge gate stacks interface formation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effect of post plasma oxidation on Ge gate stacks interface formation
S. Mukhopadhyay, S. Mitra, Y. M. Ding, K. L. Ganapathi, D. Misra, N. Bhat, K. Tapily, R. D. Clark, S. Consiglio, C. S. Wajda, G. J. Leusink
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
9
Scopus
citations