Effect of post plasma oxidation on Ge gate stacks interface formation

  • S. Mukhopadhyay
  • , S. Mitra
  • , Y. M. Ding
  • , K. L. Ganapathi
  • , D. Misra
  • , N. Bhat
  • , K. Tapily
  • , R. D. Clark
  • , S. Consiglio
  • , C. S. Wajda
  • , G. J. Leusink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

9 Scopus citations

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Material Science