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Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials
O. H. Gokce, S. Amin, N. M. Ravindra, D. J. Szostak, R. J. Paff, J. G. Fleming, C. J. Galewski, J. Shallenberger, R. Eby
Research output: Contribution to journal › Article › peer-review
17
Scopus
citations