Effects of deposition parameters on Cd1-xZnxTe films prepared by RF magnetron sputtering

Hong Cao, Jun Hao Chu, Shan Li Wang, Yun Hua Wu, Chuan Jun Zhang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Cd1-xZnxTe films were deposited by RF magnetron sputtering from Cd0.96Zn0.04Te crystals target at different substrate temperatures, RF powers and working pressures. After deposition, the samples were annealed in high purity air at 473 K. The films were characterized using step profilometer, UV-VIS-NIR spectrophotometer, XRD and SEM. Depending on the deposition parameters and annealing, the values of the band gap of the CZT films varied between 1.45 and 2.02 eV.

Original languageEnglish (US)
Pages (from-to)97-101
Number of pages5
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Issue number2
StatePublished - Apr 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


  • Band gap
  • CdZnTe
  • RF magnetron sputtering
  • Thin films


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