TY - GEN
T1 - Effects of electron radiation on the optical constants of p-type silicon
AU - Russo, Onofrio L.
AU - Dumas, Katherine A.
PY - 1993
Y1 - 1993
N2 - The optical constants n and k are determined for p-type silicon at the E0 and E1 and critical point energies for one MeV electron irradiated samples. The value for fluences of 1014 and 1016 e-/cm2 are compared to samples before irradiation. The real, ε1, and imaginary, ε2, components of the dielectric function, ε, used to find n and k, were obtained by measurement of tanψ and δ using spectroscopic ellipsometry (SE). The data show that changes in δ, in particular, are greater in the region about E0 than of E1. This is consistent with electrolyte electroreflectance (EER) results in which the Lorentz line shape is narrower for E0 than for E1. The value of n is found to increase and k to decrease with e- radiation at the critical points, although, neither does so monotonically. The change in n at the E0 critical point is greater than at the higher energy main structure E1 whereas, k is a slower varying function in this region.
AB - The optical constants n and k are determined for p-type silicon at the E0 and E1 and critical point energies for one MeV electron irradiated samples. The value for fluences of 1014 and 1016 e-/cm2 are compared to samples before irradiation. The real, ε1, and imaginary, ε2, components of the dielectric function, ε, used to find n and k, were obtained by measurement of tanψ and δ using spectroscopic ellipsometry (SE). The data show that changes in δ, in particular, are greater in the region about E0 than of E1. This is consistent with electrolyte electroreflectance (EER) results in which the Lorentz line shape is narrower for E0 than for E1. The value of n is found to increase and k to decrease with e- radiation at the critical points, although, neither does so monotonically. The change in n at the E0 critical point is greater than at the higher energy main structure E1 whereas, k is a slower varying function in this region.
UR - http://www.scopus.com/inward/record.url?scp=0027192562&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027192562&partnerID=8YFLogxK
U2 - 10.1557/proc-302-591
DO - 10.1557/proc-302-591
M3 - Conference contribution
AN - SCOPUS:0027192562
SN - 1558992073
SN - 9781558992078
T3 - Materials Research Society Symposium Proceedings
SP - 591
EP - 596
BT - Materials Research Society Symposium Proceedings
PB - Publ by Materials Research Society
T2 - Proceedings of the First Symposium on Semiconductors for Room-Temperature Radiation Detector Applications
Y2 - 12 April 1993 through 16 April 1993
ER -