@inproceedings{4d2de22f60944e8699643f4815e553b4,
title = "Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry",
abstract = "Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.",
author = "Fajun Yang and Naiqi Wu and Yan Qiao and Mengchu Zhou",
year = "2016",
month = may,
day = "25",
doi = "10.1109/ICNSC.2016.7479012",
language = "English (US)",
series = "ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control",
address = "United States",
note = "13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016 ; Conference date: 28-04-2016 Through 30-04-2016",
}