Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry

Fajun Yang, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.

Original languageEnglish (US)
Title of host publicationICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781467399753
DOIs
StatePublished - May 25 2016
Event13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016 - Mexico City, Mexico
Duration: Apr 28 2016Apr 30 2016

Publication series

NameICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control

Other

Other13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016
Country/TerritoryMexico
CityMexico City
Period4/28/164/30/16

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Networks and Communications
  • Control and Systems Engineering
  • Modeling and Simulation

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