Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry

Fajun Yang; Naiqi Wu; Yan Qiao; Mengchu Zhou

doi:10.1109/ICNSC.2016.7479012

Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry

Fajun Yang, Naiqi Wu, Yan Qiao, Mengchu Zhou

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.

Original language	English (US)
Title of host publication	ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781467399753
DOIs	https://doi.org/10.1109/ICNSC.2016.7479012
State	Published - May 25 2016
Event	13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016 - Mexico City, Mexico Duration: Apr 28 2016 → Apr 30 2016

Publication series

Name	ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control

Other

Other	13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016
Country/Territory	Mexico
City	Mexico City
Period	4/28/16 → 4/30/16

All Science Journal Classification (ASJC) codes

Artificial Intelligence
Computer Networks and Communications
Control and Systems Engineering
Modeling and Simulation

Access to Document

10.1109/ICNSC.2016.7479012

Cite this

Yang, F., Wu, N., Qiao, Y., & Zhou, M. (2016). Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry. In ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control Article 7479012 (ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICNSC.2016.7479012

Yang, Fajun ; Wu, Naiqi ; Qiao, Yan et al. / Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry. ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control. Institute of Electrical and Electronics Engineers Inc., 2016. (ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control).

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title = "Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry",

abstract = "Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.",

author = "Fajun Yang and Naiqi Wu and Yan Qiao and Mengchu Zhou",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016 ; Conference date: 28-04-2016 Through 30-04-2016",

year = "2016",

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doi = "10.1109/ICNSC.2016.7479012",

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Yang, F, Wu, N, Qiao, Y & Zhou, M 2016, Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry. in ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control., 7479012, ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control, Institute of Electrical and Electronics Engineers Inc., 13th IEEE International Conference on Networking, Sensing and Control, ICNSC 2016, Mexico City, Mexico, 4/28/16. https://doi.org/10.1109/ICNSC.2016.7479012

Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry. / Yang, Fajun; Wu, Naiqi; Qiao, Yan et al.
ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control. Institute of Electrical and Electronics Engineers Inc., 2016. 7479012 (ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.

AB - Scheduling a multi-cluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model its dynamic behavior. By using this model, its schedule is found and analytically expressed as a function of robots' waiting time. In addition, this work establishes the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require one to determine the robots' waiting time via simple calculation and thus are efficient.

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Yang F, Wu N, Qiao Y, Zhou M. Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry. In ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control. Institute of Electrical and Electronics Engineers Inc. 2016. 7479012. (ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control). doi: 10.1109/ICNSC.2016.7479012

Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry

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