Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry

Fajun Yang, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry'. Together they form a unique fingerprint.

Keyphrases

Engineering