Electrical characterization of dry and wet processed interface layer in Ge/high-K devices

Y. Ding, D. Misra, M. N. Bhuyian, K. Tapily, R. D. Clark, S. Consiglio, C. S. Wajda, G. J. Leusink

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

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Engineering & Materials Science