Electrical characterization of dry and wet processed interface layer in Ge/High-K devices

  • Y. M. Ding
  • , D. Misra
  • , M. N. Bhuyian
  • , Kandabara Tapily
  • , Robert D. Clark
  • , Steve Consiglio
  • , Cory S. Wajda
  • , Gert J. Leusink

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Keyphrases

Engineering

Physics

Material Science