Electrical degradation of AI/TiW/CoSi2 shallow junctions

S. A. Eshraghi, G. E. Georgiou, R. Uu, R. C. Beairsto, K. P. Cheung

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Electrical degradation of AI/TiW/CoSi2 shallow junctions'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Physics