Electrical degradation of AI/TiW/CoSi2 shallow junctions

  • S. A. Eshraghi
  • , G. E. Georgiou
  • , R. Uu
  • , R. C. Beairsto
  • , K. P. Cheung

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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Keyphrases

Engineering

Material Science

Physics