Original language | English (US) |
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State | Published - Dec 1 2004 |
Event | Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States Duration: Oct 3 2004 → Oct 8 2004 |
Other
Other | Microfabricated Systems and MEMS VII - Proceedings of the International Symposium |
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Country/Territory | United States |
City | Honolulu, HI |
Period | 10/3/04 → 10/8/04 |
All Science Journal Classification (ASJC) codes
- Engineering(all)