| Original language | English (US) |
|---|---|
| Pages | iii |
| State | Published - 2004 |
| Event | Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States Duration: Oct 3 2004 → Oct 8 2004 |
Other
| Other | Microfabricated Systems and MEMS VII - Proceedings of the International Symposium |
|---|---|
| Country/Territory | United States |
| City | Honolulu, HI |
| Period | 10/3/04 → 10/8/04 |
All Science Journal Classification (ASJC) codes
- General Engineering