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Electron accumulation at nonpolar and semipolar surfaces of wurtzite InN from generalized infrared ellipsometry

  • V. Darakchieva
  • , M. Schubert
  • , T. Hofmann
  • , B. Monemar
  • , Ching Lien Hsiao
  • , Ting Wei Liu
  • , Li Chyong Chen
  • , W. J. Schaff
  • , Y. Takagi
  • , Y. Nanishi

Research output: Contribution to journalArticlepeer-review

Abstract

The free electron properties of nonpolar (11 2̄0) -oriented and semipolar (10 1̄1) -oriented wurtzite InN films are studied by generalized infrared ellipsometry (GIRSE). We demonstrate the sensitivity of GIRSE to the surface charge accumulation layer and find a distinct surface electron accumulation to occur at all surfaces. The obtained surface electron sheet densities are found to vary from 0.9× 1013 to 2.3× 1014 cm-2 depending on the surface orientation and bulk electron concentration. The upper limits of the surface electron mobility parameters of 417-644 cm2 /V s are determined and discussed in the light of electron confinement at the surface.

Original languageEnglish (US)
Article number202103
JournalApplied Physics Letters
Volume95
Issue number20
DOIs
StatePublished - 2009
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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