Electron-beam evaporated phosphosilicate glass encapsulant for post-implant annealing of GaAs

S. Singh, F. Baiocchi, A. D. Butherus, W. H. Grodkiewicz, B. Schwartz, L. G. Van Uitert, L. Yesis, G. J. Zydzik

Research output: Contribution to journal › Article › peer-review