Elimination of Cross Sensitivity in a Three-Dimensional Magnetic Sensor

Durgamadhab Misra, Bingda Wang

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

In three-dimensional (3-D) integrated magnetic sensor de- sign, cross-axis sensitivities among the various components of the magnetic field have been a problem. In this brief it is demonstrated that complete elimination of the cross-sensitivity is possible if a 3-D magnetic sensor is implemented in BiCMOS technology. A compact device structure is designed to detect the three components of the magnetic field vector by placing a split-collector magnetotransistor and a split-drain MOSFET adjacent to each other. Measured sensitivities of the sensor are presented.

Original languageEnglish (US)
Pages (from-to)622-624
Number of pages3
JournalIEEE Transactions on Electron Devices
Volume41
Issue number4
DOIs
StatePublished - Jan 1 1994

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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