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Emerging high-k dielectrics for nanometer CMOS technologies and memory devices

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationAdvanced Technologies for Next Generation Integrated Circuits
PublisherInstitution of Engineering and Technology
Pages159-196
Number of pages38
ISBN (Electronic)9781785616648
StatePublished - Jan 1 2020

All Science Journal Classification (ASJC) codes

  • General Engineering

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