TY - GEN
T1 - Enhanced crystallinity and photoelectrochemical response of (Ga,N) and (Al,N) co-doped ZnO films
AU - Shet, Sudhakar
AU - Ahn, Kwang Soon
AU - Ravindra, N. M.
AU - Yan, Yanfa
AU - Deutsch, Todd
AU - Turner, John
AU - Al-Jassim, M.
PY - 2009
Y1 - 2009
N2 - In this study, co-doped ZnO:(Ga,N) and ZnO:(Al,N) films were deposited by co-sputtering at room temperature and 100°C, followed by post-annealing at 500°C. Nitrogen-doped ZnO films, ZnO:N(1) and ZnO:N(2), were deposited at substrate temperatures of 500°C and 100°C, respectively. We found that the ZnO:(Ga,N) and ZnO:(Al,N) films exhibited greatly enhanced crystallinity compared to ZnO:N(1) and ZnO:N(2) films doped with pure N. Furthermore, the ZnO:(Ga,N) and ZnO:(Al,N) films showed much higher N-incorporation than ZnO:N films grown at 100°C and 500°C with pure N doping. As a result, the ZnO:(Ga,N) and ZnO:(Al,N) films showed significantly higher photocurrents than ZnO:N(1) and ZnO:N(2) doped by N alone at both high and low temperatures. Our results suggest that the passive co-doping approach is a preferred method for synthesizing metal oxides with both high crystallinity and impurity incorporation, which should help to improve their photoelectrochemical performance.
AB - In this study, co-doped ZnO:(Ga,N) and ZnO:(Al,N) films were deposited by co-sputtering at room temperature and 100°C, followed by post-annealing at 500°C. Nitrogen-doped ZnO films, ZnO:N(1) and ZnO:N(2), were deposited at substrate temperatures of 500°C and 100°C, respectively. We found that the ZnO:(Ga,N) and ZnO:(Al,N) films exhibited greatly enhanced crystallinity compared to ZnO:N(1) and ZnO:N(2) films doped with pure N. Furthermore, the ZnO:(Ga,N) and ZnO:(Al,N) films showed much higher N-incorporation than ZnO:N films grown at 100°C and 500°C with pure N doping. As a result, the ZnO:(Ga,N) and ZnO:(Al,N) films showed significantly higher photocurrents than ZnO:N(1) and ZnO:N(2) doped by N alone at both high and low temperatures. Our results suggest that the passive co-doping approach is a preferred method for synthesizing metal oxides with both high crystallinity and impurity incorporation, which should help to improve their photoelectrochemical performance.
KW - Al incorporation
KW - Bandgap reduction
KW - Co-doping
KW - F-doped tin oxide
KW - Ga incorporation
KW - Photoelectrochemical
KW - Post-deposition annealing
KW - Sputtering
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M3 - Conference contribution
AN - SCOPUS:77649119080
SN - 9781615676361
T3 - Materials Science and Technology Conference and Exhibition 2009, MS and T'09
SP - 277
EP - 286
BT - Materials Science and Technology Conference and Exhibition 2009, MS and T'09
T2 - Materials Science and Technology Conference and Exhibition 2009, MS and T'09
Y2 - 25 October 2009 through 29 October 2009
ER -