Enhanced SiO 2 reliability on deuterium-implanted silicon

Tias Kundu, Durgamadhab Misra

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint Dive into the research topics of 'Enhanced SiO <sub>2</sub> reliability on deuterium-implanted silicon'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science