Evaluation of Ar-diluted silane PECVD for thin film Si: H based solar cells

J. A.Anna Selvan, Yuan Min Li, Liwei Li, Alan E. Delahoy

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish (US)
Pages (from-to)611-616
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Volume808
DOIs
StatePublished - 2004
EventAmorphous and Nanocrystalline Silicon Science and Technology - 2004 - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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