Evaluation of Ar-diluted silane PECVD for thin film Si: H based solar cells

J. A.Anna Selvan; Yuan Min Li; Liwei Li; Alan E. Delahoy

doi:10.1557/proc-808-a9.46

Evaluation of Ar-diluted silane PECVD for thin film Si: H based solar cells

J. A.Anna Selvan, Yuan Min Li, Liwei Li, Alan E. Delahoy

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	611-616
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	808
DOIs	https://doi.org/10.1557/proc-808-a9.46
State	Published - 2004
Externally published	Yes
Event	Amorphous and Nanocrystalline Silicon Science and Technology - 2004 - San Francisco, CA, United States Duration: Apr 13 2004 → Apr 16 2004

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-808-a9.46

Cite this

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title = "Evaluation of Ar-diluted silane PECVD for thin film Si: H based solar cells",

author = "Selvan, \{J. A.Anna\} and Li, \{Yuan Min\} and Liwei Li and Delahoy, \{Alan E.\}",

year = "2004",

doi = "10.1557/proc-808-a9.46",

language = "English (US)",

volume = "808",

pages = "611--616",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Amorphous and Nanocrystalline Silicon Science and Technology - 2004 ; Conference date: 13-04-2004 Through 16-04-2004",

}

TY - JOUR

T1 - Evaluation of Ar-diluted silane PECVD for thin film Si

T2 - Amorphous and Nanocrystalline Silicon Science and Technology - 2004

AU - Selvan, J. A.Anna

AU - Li, Yuan Min

AU - Li, Liwei

AU - Delahoy, Alan E.

PY - 2004

Y1 - 2004

UR - https://www.scopus.com/pages/publications/12744276047

UR - https://www.scopus.com/inward/citedby.url?scp=12744276047&partnerID=8YFLogxK

U2 - 10.1557/proc-808-a9.46

DO - 10.1557/proc-808-a9.46

M3 - Conference article

AN - SCOPUS:12744276047

SN - 0272-9172

VL - 808

SP - 611

EP - 616

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

Y2 - 13 April 2004 through 16 April 2004

ER -

Evaluation of Ar-diluted silane PECVD for thin film Si: H based solar cells

All Science Journal Classification (ASJC) codes

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