This study describes the use of x-ray fluorescence as an analytical tool for determining phosphorus concentration in phosphosilicate glass. By comparison with other available methods, we shall demonstrate that this direct measurement technique is accurate, simple, fast, reproducible, and nondestructive. With the use of this technique, flow and reflow profiles of phosphosilicate glass will be illustrated at different phosphorus concentrations and representative thermal cycles.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Renewable Energy, Sustainability and the Environment
- Surfaces, Coatings and Films
- Materials Chemistry