Extraordinary crystallization of amorphous Si/SiO₂ superlattices

Keyphrases

• Superlattices 100%
• Amorphous Crystallization 100%
• Si-SiO2 100%
• Amorphous Si 100%
• Crystallization Temperature 100%
• Order of Magnitude 50%
• Exponential Increase 50%
• Layer Thickness 50%
• Melting Temperature 50%
• A-Si 50%
• Silica 50%
• SiOx 50%
• Plasma Oxidation 50%
• RF Plasma 50%
• RF Sputtering 50%
• Superlattice Structure 50%
• Nanometer Size 50%
• Si Crystal 50%
• Inhomogeneous Strain 50%

Engineering

• Crystallization Temperature 100%
• Nanometre 50%
• Layer Thickness 50%
• Melting Temperature 50%
• Superlattice Structure 50%

Material Science

• Superlattice 100%
• Amorphous Material 100%
• Oxidation Reaction 33%