Fabry-Perot diaphragm fiber-optic sensor

Ken K. Chin, Yan Sun, Guanhua Feng, George E. Georgiou, Kangzhu Guo, Edip Niver, Harry Roman, Karen Noe

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

Abstract

The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.

Original languageEnglish (US)
Pages (from-to)7614-7619
Number of pages6
JournalApplied Optics
Volume46
Issue number31
DOIs
StatePublished - Nov 1 2007

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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