Fabry-Perot diaphragm fiber-optic sensor

Ken K. Chin; Yan Sun; Guanhua Feng; George E. Georgiou; Kangzhu Guo; Edip Niver; Harry Roman; Karen Noe

doi:10.1364/AO.46.007614

Fabry-Perot diaphragm fiber-optic sensor

Ken K. Chin, Yan Sun, Guanhua Feng, George E. Georgiou, Kangzhu Guo, Edip Niver, Harry Roman, Karen Noe

Research output: Contribution to journal › Article › peer-review

50 Scopus citations

Abstract

The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.

Original language	English (US)
Pages (from-to)	7614-7619
Number of pages	6
Journal	Applied Optics
Volume	46
Issue number	31
DOIs	https://doi.org/10.1364/AO.46.007614
State	Published - Nov 1 2007

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.46.007614

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abstract = "The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.",

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AU - Chin, Ken K.

AU - Sun, Yan

AU - Feng, Guanhua

AU - Georgiou, George E.

AU - Guo, Kangzhu

AU - Niver, Edip

AU - Roman, Harry

AU - Noe, Karen

PY - 2007/11/1

Y1 - 2007/11/1

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AB - The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.

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Fabry-Perot diaphragm fiber-optic sensor

Abstract

All Science Journal Classification (ASJC) codes

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