Abstract
The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.
Original language | English (US) |
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Title of host publication | 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings |
Pages | 229-232 |
Number of pages | 4 |
Volume | 3 |
State | Published - Aug 23 2007 |
Event | 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 - Santa Clara, CA, United States Duration: May 20 2007 → May 24 2007 |
Other
Other | 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 |
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Country/Territory | United States |
City | Santa Clara, CA |
Period | 5/20/07 → 5/24/07 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering