Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection

Y. Sun; G. Feng; George Georgiou; I. Padron; Edip Niver; K. Noe; Ken Chin

Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection

Y. Sun, G. Feng, George Georgiou, I. Padron, Edip Niver, K. Noe, Ken Chin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.

Original language	English (US)
Title of host publication	2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Pages	229-232
Number of pages	4
Volume	3
State	Published - Aug 23 2007
Event	2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 - Santa Clara, CA, United States Duration: May 20 2007 → May 24 2007

Other

Other	2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007
Country/Territory	United States
City	Santa Clara, CA
Period	5/20/07 → 5/24/07

All Science Journal Classification (ASJC) codes

Mechanical Engineering

Cite this

@inproceedings{76b6a13c36ae49608f94f768eb1dfd06,

title = "Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection",

abstract = "The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.",

author = "Y. Sun and G. Feng and George Georgiou and I. Padron and Edip Niver and K. Noe and Ken Chin",

year = "2007",

month = aug,

day = "23",

language = "English (US)",

isbn = "1420063421",

volume = "3",

pages = "229--232",

booktitle = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings",

note = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 ; Conference date: 20-05-2007 Through 24-05-2007",

}

Sun, Y, Feng, G, Georgiou, G, Padron, I, Niver, E, Noe, K & Chin, K 2007, Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection. in 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings. vol. 3, pp. 229-232, 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Santa Clara, CA, United States, 5/20/07.

TY - GEN

T1 - Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection

AU - Sun, Y.

AU - Feng, G.

AU - Georgiou, George

AU - Padron, I.

AU - Niver, Edip

AU - Noe, K.

AU - Chin, Ken

PY - 2007/8/23

Y1 - 2007/8/23

N2 - The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.

AB - The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.

UR - http://www.scopus.com/inward/record.url?scp=34547977355&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34547977355&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:34547977355

SN - 1420063421

SN - 9781420063424

SN - 1420061844

SN - 9781420061840

VL - 3

SP - 229

EP - 232

BT - 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings

T2 - 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007

Y2 - 20 May 2007 through 24 May 2007

ER -

Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection

Abstract

Other

All Science Journal Classification (ASJC) codes

Other files and links

Fingerprint

Cite this