Fabry-Perot diaphragm fiber optic sensor (DFOS) for acoustic detection

Y. Sun, G. Feng, George Georgiou, I. Padron, Edip Niver, K. Noe, Ken Chin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.

Original languageEnglish (US)
Title of host publication2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Pages229-232
Number of pages4
Volume3
StatePublished - Aug 23 2007
Event2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 - Santa Clara, CA, United States
Duration: May 20 2007May 24 2007

Other

Other2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007
CountryUnited States
CitySanta Clara, CA
Period5/20/075/24/07

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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