TY - GEN
T1 - Far infrared studies of silicon using terahertz spectroscopy
AU - Sengupta, Amartya
AU - Bandyopadhyay, Aparajita
AU - Federici, John F.
AU - Ravindra, Nuggehalli M.
PY - 2005
Y1 - 2005
N2 - In this work, the optical properties of p- type silicon wafers, of various thicknesses, have been studied in the frequency range of 0.2 - 1.2 THz. It is seen that, for low resistivity silicon, the optical properties are dominated by the presence of dopants. The analysis technique deployed in the present work explores a general iterative procedure to determine the real and imaginary parts of the complex dielectric constant without utilizing Kramers-Kronig relationships. This study not only holds scientific relevance in material science but also opens up rich avenues for novel applications of terahertz spectroscopy to semiconductors.
AB - In this work, the optical properties of p- type silicon wafers, of various thicknesses, have been studied in the frequency range of 0.2 - 1.2 THz. It is seen that, for low resistivity silicon, the optical properties are dominated by the presence of dopants. The analysis technique deployed in the present work explores a general iterative procedure to determine the real and imaginary parts of the complex dielectric constant without utilizing Kramers-Kronig relationships. This study not only holds scientific relevance in material science but also opens up rich avenues for novel applications of terahertz spectroscopy to semiconductors.
KW - Characterization
KW - Electronic materials
KW - Terahertz spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=33845516349&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33845516349&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33845516349
SN - 0873396456
SN - 9780873396455
T3 - Materials Science and Technology
SP - 39
EP - 48
BT - Materials Science and Technology 2005 - Proceedings of the Conference
T2 - Materials Science and Technology 2005 Conference
Y2 - 25 September 2005 through 28 September 2005
ER -