Flexible membrane pressure sensor

H. C. Lim, B. Schulkin, M. J. Pulickal, S. Liu, R. Petrova, G. Thomas, S. Wagner, K. Sidhu, J. F. Federici

Research output: Contribution to journalArticlepeer-review

70 Scopus citations

Abstract

A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution.

Original languageEnglish (US)
Pages (from-to)332-335
Number of pages4
JournalSensors and Actuators, A: Physical
Volume119
Issue number2
DOIs
StatePublished - Apr 13 2005

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Keywords

  • Flexible substrate
  • Membrane
  • Pressure sensor

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