Flexible membrane pressure sensor

H. C. Lim; B. Schulkin; M. J. Pulickal; S. Liu; R. Petrova; G. Thomas; S. Wagner; K. Sidhu; J. F. Federici

doi:10.1016/j.sna.2004.10.012

Flexible membrane pressure sensor

H. C. Lim, B. Schulkin, M. J. Pulickal, S. Liu, R. Petrova, G. Thomas, S. Wagner, K. Sidhu, J. F. Federici

Research output: Contribution to journal › Article › peer-review

86 Scopus citations

Abstract

A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution.

Original language	English (US)
Pages (from-to)	332-335
Number of pages	4
Journal	Sensors and Actuators, A: Physical
Volume	119
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2004.10.012
State	Published - Apr 13 2005

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Keywords

Flexible substrate
Membrane
Pressure sensor

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10.1016/j.sna.2004.10.012

Cite this

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title = "Flexible membrane pressure sensor",

abstract = "A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution.",

keywords = "Flexible substrate, Membrane, Pressure sensor",

author = "Lim, {H. C.} and B. Schulkin and Pulickal, {M. J.} and S. Liu and R. Petrova and G. Thomas and S. Wagner and K. Sidhu and Federici, {J. F.}",

note = "Funding Information: The authors would like to thank the following persons and institutions for their generosity and help: Charles {\textquoteleft}Ned{\textquoteright} Forbes of Visible-Knowledgy Inc., NJ, technician and laboratory manager at Center for Photonics and Optoelectronic Materials (POEM) of Princeton University. Their contributions are appreciated. This work is supported by the Picatinny Arsenal through the Smart Coatings {\textregistered} program and the New Jersey Commission on Science and Technology (NJCST).",

year = "2005",

month = apr,

day = "13",

doi = "10.1016/j.sna.2004.10.012",

language = "English (US)",

volume = "119",

pages = "332--335",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

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T1 - Flexible membrane pressure sensor

AU - Lim, H. C.

AU - Schulkin, B.

AU - Pulickal, M. J.

AU - Liu, S.

AU - Petrova, R.

AU - Thomas, G.

AU - Wagner, S.

AU - Sidhu, K.

AU - Federici, J. F.

N1 - Funding Information: The authors would like to thank the following persons and institutions for their generosity and help: Charles ‘Ned’ Forbes of Visible-Knowledgy Inc., NJ, technician and laboratory manager at Center for Photonics and Optoelectronic Materials (POEM) of Princeton University. Their contributions are appreciated. This work is supported by the Picatinny Arsenal through the Smart Coatings ® program and the New Jersey Commission on Science and Technology (NJCST).

PY - 2005/4/13

Y1 - 2005/4/13

N2 - A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution.

AB - A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution.

KW - Flexible substrate

KW - Membrane

KW - Pressure sensor

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U2 - 10.1016/j.sna.2004.10.012

DO - 10.1016/j.sna.2004.10.012

M3 - Article

AN - SCOPUS:17044385029

SN - 0924-4247

VL - 119

SP - 332

EP - 335

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 2

ER -

Flexible membrane pressure sensor

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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