Abstract
Graphene-driving strain-pre-store engineering enables the epitaxy of strain-free AlN film with low dislocation density for DUV-LED and the unique mechanism of strain-relaxation in QvdW epitaxy was demystified.
Original language | English (US) |
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Article number | 164 |
Journal | Light: Science and Applications |
Volume | 11 |
Issue number | 1 |
DOIs | |
State | Published - Dec 2022 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics