Abstract
Graphene-driving strain-pre-store engineering enables the epitaxy of strain-free AlN film with low dislocation density for DUV-LED and the unique mechanism of strain-relaxation in QvdW epitaxy was demystified.
| Original language | English (US) |
|---|---|
| Article number | 164 |
| Journal | Light: Science and Applications |
| Volume | 11 |
| Issue number | 1 |
| DOIs | |
| State | Published - Dec 2022 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics