Growth of single-walled carbon nanotubes by microwave plasma enhanced chemical vapor deposition

Matthew R. Maschmann, Amit Goyal, Zafar Iqbal, Timothy S. Fisher, Roy Gat

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Single-walled carbon nanotubes (SWCNTs) have been grown for the first time by microwave plasma-enhanced chemical vapor deposition (PECVD) at 800°C using methane as the precursor and bimetallic Mo/Co catalyst supported on MgO dispersed on a silicon wafer. The nanotubes grown consist of bundles, each composed of individual tubes of a single diameter associated with either metallic or semiconducting SWCNTs, based on characterization by Raman spectroscopy. Field-emission scanning electron microscopy and atomic force microscopy show that the bundles are relatively thin - 5 to 10 nm in diameter - and up to a few micrometers in length. The results are compared with those obtained on recently reported SWCNTs grown by radio frequency PECVD.

Original languageEnglish (US)
Title of host publicationFunctional Carbon Nanotubes
PublisherMaterials Research Society
Number of pages13
ISBN (Print)1558998101, 9781558998100
StatePublished - 2004
Event2004 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 29 2004Dec 2 2004

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2004 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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