@inproceedings{02937d8416124f6ea4fc691f69ac7590,
title = "Growth of single-walled carbon nanotubes by microwave plasma enhanced chemical vapor deposition",
abstract = "Single-walled carbon nanotubes (SWCNTs) have been grown for the first time by microwave plasma-enhanced chemical vapor deposition (PECVD) at 800°C using methane as the precursor and bimetallic Mo/Co catalyst supported on MgO dispersed on a silicon wafer. The nanotubes grown consist of bundles, each composed of individual tubes of a single diameter associated with either metallic or semiconducting SWCNTs, based on characterization by Raman spectroscopy. Field-emission scanning electron microscopy and atomic force microscopy show that the bundles are relatively thin - 5 to 10 nm in diameter - and up to a few micrometers in length. The results are compared with those obtained on recently reported SWCNTs grown by radio frequency PECVD.",
author = "Maschmann, {Matthew R.} and Amit Goyal and Zafar Iqbal and Fisher, {Timothy S.} and Roy Gat",
year = "2004",
doi = "10.1557/proc-858-hh1.3",
language = "English (US)",
isbn = "1558998101",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "1--13",
booktitle = "Functional Carbon Nanotubes",
address = "United States",
note = "2004 MRS Fall Meeting ; Conference date: 29-11-2004 Through 02-12-2004",
}