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High k dielectrics on high-mobility substrates: The interface!
Durga Misra
Electrical and Computer Engineering
Research output
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Contribution to journal
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Article
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peer-review
16
Scopus citations
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Engineering & Materials Science
High-k dielectric
100%
Substrates
44%
Passivation
25%
Surface treatment
22%
Annealing
21%
Defects
14%
Temperature
8%
Chemical Compounds
Dielectric Material
56%
Deposition Process
34%
Chemical Passivation
32%
Annealing
24%
Surface
20%