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High-precision, multiple degree-of-freedom piezoelectric actuator
Timothy Chang
, Xuemei Sun
, Vincenzo Pappano
,
Zhiming Ji
, Reggie Caudill
Mechanical and Industrial Engr
MT School of Management
Office of the Dean - MTSM
Research output
:
Contribution to journal
›
Conference article
›
peer-review
5
Scopus citations
Overview
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Engineering
Degree of Freedom
100%
Nonlinearity
100%
Scale Factor
100%
Piezoelectric Actuator
100%
Optical Fiber
50%
Nanometre
50%
Optoelectronics
50%
Actuation
50%
Realization
50%
Feedforward
50%
Angular Resolution
50%
Feedback Control System
50%
Two Degree of Freedom
50%
Fiber Alignment
50%
Digital Signal Processor
50%
Keyphrases
Actuator
100%
Piezoelectric Actuator
100%
Multi-degree-of-freedom (multi-DOF)
100%
Oscillation
16%
Material Properties
16%
High Bandwidth
16%
Nonlinearity
16%
Actuation
16%
Feedforward Input
16%
Angular Resolution
16%
Pentium
16%
Two-degree-of-freedom
16%
Nanometer Resolution
16%
Six Degrees of Freedom
16%
Geometric Properties
16%
Hysteresis
16%
Linear Resolution
16%
Semiconductor Processing
16%
High Force
16%
Monolithic Structure
16%
Optical Fiber Alignment
16%
Scale Factor
16%
Feedback Control
16%
Soft Spring
16%
Input Shaping Control
16%
Scale Factor Nonlinearity
16%
Digital Signal Processor
16%