High rate photochemical deposition of amorphous silicon from higher silanes

Keyphrases

• Absorption Length 50%
• Amorphous Silicon 100%
• Band Gap 50%
• Deposition Rate 100%
• Diffusion Length 50%
• Hydrogenated Amorphous Silicon 50%
• IR Absorption 50%
• Length Measurement 50%
• Mercury 50%
• Perfluorinated 50%
• Photo-CVD 50%
• Photochemical Deposition 100%
• Photoluminescence 50%
• Silane 100%
• Sticking Coefficient 50%
• Time Dependence 50%
• Window Coating 50%

Engineering

• Chemical Vapor Deposition 50%
• Coating Window 50%
• Deposition Rate 100%
• Diffusion Length 50%
• Energy Gap 50%
• Hydrogenated Amorphous Silicon 50%

Chemical Engineering

• Chemical Vapor Deposition 50%
• Deposition Rate 100%