High-speed multiphoton absorption polymerization: Fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios

George Kumi, Ciceron O. Yanez, Kevin D. Belfield, John T. Fourkas

Research output: Contribution to journalArticlepeer-review

87 Scopus citations

Abstract

We demonstrate the use of high-speed, multiphoton absorption polymerization (MAP) for the fabrication of large-area microfluidic master structures. High-speed fabrication in SU8 without laser-induced damage is made possible by the use of a novel photoacid generator with a high two-photon-absorption cross-section. Master structures fabricated with MAP can be used to produce polydimethylsiloxane microchannels with high aspect ratios and/or arbitrary cross-sections. Microchannels with different cross-sections and heights can be combined readily in a single device. This fabrication technique significantly increases the diversity of channel architectures available for microfluidic devices.

Original languageEnglish (US)
Pages (from-to)1057-1060
Number of pages4
JournalLab on a Chip
Volume10
Issue number8
DOIs
StatePublished - 2010
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biochemistry
  • Chemistry(all)
  • Biomedical Engineering

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