How to respond to process module failure in residency time-constrained single-arm cluster tools

Keyphrases

• Residency Time 100%
• Process Module 100%
• Time-constrained 100%
• Single-arm Cluster Tool 100%
• Module Failure 100%
• Cyclic Scheduling 66%
• Response Policy 66%
• Failure Response 66%
• Real-time Control 33%
• Dynamic Behavior 33%
• Wafer 33%
• Petri Nets 33%
• Petri Net Model 33%
• Illustrative Examples 33%
• Control Law 33%
• Cluster Tools 33%
• Residency Time Constraints 33%
• Failure-prone 33%
• Cyclic Operation 33%

Computer Science

• Petri Net 100%
• Response Policy 100%
• Time Constraint 50%
• Dynamic Behavior 50%
• Cyclic Scheduling 50%
• Cyclic Schedule 50%

Engineering

• Failure Response 100%
• Dynamic Behavior 50%
• Petri Net Model 50%
• Control Law 50%