TY - GEN
T1 - How to start-up dual-arm cluster tools involving a wafer revisiting process
AU - Pan, Chunrong
AU - Zhou, Mengchu
AU - Qiao, Yan
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/10/7
Y1 - 2015/10/7
N2 - For some wafer fabrication processes, e.g., atomic layer deposition, wafers need to visit some process modules for a number of times instead of once, which leads to a revisiting process. It is complicated to schedule cluster tools with wafer revisiting in semiconductor fabrication. Most studies on cluster tool scheduling aim to find the optimal steady state schedule. However, the recent trend to run small batches of different wafers has raised more needs for efficient start-up and close-down processes of cluster tools with wafer revisiting. This paper introduces two scheduling strategies to schedule the start-up transient process. After the tool finishes it from the idle state, it reaches a required steady state from which an optimal one-wafer cyclic schedule can be put into use. An industrial case is given to show the applications of the obtained results.
AB - For some wafer fabrication processes, e.g., atomic layer deposition, wafers need to visit some process modules for a number of times instead of once, which leads to a revisiting process. It is complicated to schedule cluster tools with wafer revisiting in semiconductor fabrication. Most studies on cluster tool scheduling aim to find the optimal steady state schedule. However, the recent trend to run small batches of different wafers has raised more needs for efficient start-up and close-down processes of cluster tools with wafer revisiting. This paper introduces two scheduling strategies to schedule the start-up transient process. After the tool finishes it from the idle state, it reaches a required steady state from which an optimal one-wafer cyclic schedule can be put into use. An industrial case is given to show the applications of the obtained results.
KW - Automated manufacturing systems
KW - automation
KW - discrete event systems
KW - optimization
KW - scheduling
UR - http://www.scopus.com/inward/record.url?scp=84952791991&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84952791991&partnerID=8YFLogxK
U2 - 10.1109/CoASE.2015.7294260
DO - 10.1109/CoASE.2015.7294260
M3 - Conference contribution
AN - SCOPUS:84952791991
T3 - IEEE International Conference on Automation Science and Engineering
SP - 1194
EP - 1199
BT - 2015 IEEE Conference on Automation Science and Engineering
PB - IEEE Computer Society
T2 - 11th IEEE International Conference on Automation Science and Engineering, CASE 2015
Y2 - 24 August 2015 through 28 August 2015
ER -