Abstract
For some wafer fabrication processes, e.g., atomic layer deposition, wafers need to visit some process modules for a number of times instead of once, which leads to a revisiting process. It is complicated to schedule cluster tools with wafer revisiting in semiconductor fabrication. Most studies on cluster tool scheduling aim to find the optimal steady state schedule. However, the recent trend to run small batches of different wafers has raised more needs for efficient start-up and close-down processes of cluster tools with wafer revisiting. This paper introduces two scheduling strategies to schedule the start-up transient process. After the tool finishes it from the idle state, it reaches a required steady state from which an optimal one-wafer cyclic schedule can be put into use. An industrial case is given to show the applications of the obtained results.
Original language | English (US) |
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Title of host publication | 2015 IEEE Conference on Automation Science and Engineering |
Subtitle of host publication | Automation for a Sustainable Future, CASE 2015 |
Publisher | IEEE Computer Society |
Pages | 1194-1199 |
Number of pages | 6 |
Volume | 2015-October |
ISBN (Electronic) | 9781467381833 |
DOIs | |
State | Published - Oct 7 2015 |
Event | 11th IEEE International Conference on Automation Science and Engineering, CASE 2015 - Gothenburg, Sweden Duration: Aug 24 2015 → Aug 28 2015 |
Other
Other | 11th IEEE International Conference on Automation Science and Engineering, CASE 2015 |
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Country/Territory | Sweden |
City | Gothenburg |
Period | 8/24/15 → 8/28/15 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering