Abstract
This paper describes a paradigm processing approach for the crystallization and growth of ferroelectric thin films by hydrothermal epitaxy. Following this approach, studies investigating the influence of solution composition, suspended phase characteristics, reactor-based variables, and temperature are all factored into targeting optimum conditions for the growth of large crystals. As an illustrative example, results for the hydrothermal epitaxy of lead zirconate titanate (PZT) films on strontium titanate substrates are reported. Films grown from zirconium-titanium hydrous oxides suspended in electrolyte solutions are used to grow transparent, oriented, and pore-free films at thicknesses as large as 1 μm. Crystals as thick as 25 μm can also be grown, but with a loss of epitaxy and the introduction of porosity. Systematic studies of key process variables suggest a particle impingement modulated crystallization mechanism and the implications of this mechanism on the design of crystallizers for robust of PZT film growth are briefly discussed.
Original language | English (US) |
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Pages | 181-189 |
Number of pages | 9 |
State | Published - 2005 |
Event | Epitaxial Growth of Functional Oxides - Proceedings of the International Symposium - Orlando, FL, United States Duration: Oct 12 2003 → Oct 17 2003 |
Other
Other | Epitaxial Growth of Functional Oxides - Proceedings of the International Symposium |
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Country/Territory | United States |
City | Orlando, FL |
Period | 10/12/03 → 10/17/03 |
All Science Journal Classification (ASJC) codes
- General Engineering