Impact of cyclic plasma treatment on oxygen vacancy defects in TiN/HfZrO/SiON/Si gate stacks

Md Nasir Uddin Bhuyian, S. Poddar, D. Misra, K. Tapily, R. D. Clark, S. Consiglio, C. S. Wajda, G. Nakamura, G. J. Leusink

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Impact of cyclic plasma treatment on oxygen vacancy defects in TiN/HfZrO/SiON/Si gate stacks'. Together they form a unique fingerprint.

Physics & Astronomy