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Impact of plasma-charging damage polarity on MOSFET noise

  • K. P. Cheung
  • , S. Martin
  • , D. Misra
  • , K. Steiner
  • , J. I. Colonell
  • , C. P. Chang
  • , W. Y.C. Lai
  • , C. T. Liu
  • , R. Liu
  • , C. S. Pai

Research output: Contribution to journalConference articlepeer-review

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Physics