Impact of slot plane antenna annealing on carrier transport mechanism and reliability on ZrO2/Al2O3/Ge Gate Stack

Y. M. Ding, D. Misra, K. Tapily, R. D. Clark, S. Consiglio, C. S. Wajda, G. J. Leusink

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Impact of slot plane antenna annealing on carrier transport mechanism and reliability on ZrO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/Ge Gate Stack'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds