@inproceedings{220bb742b67c4b5dbf41ff8318d3ce81,
title = "Impact of voltage and current stress on TiN/HfSixO y/TiN MIM capacitors",
abstract = "In this paper we have investigated the long-term reliability of TiN/HfSixOy/TiN Metal-Insulator-Metal (MIM) capacitors by using constant voltage stress (CVS) and constant current stress (CCS). No significant increase in leakage current was observed as a function of stress time. On the other hand stress induced capacitance changes were observed due to change in dielectric constant.",
author = "K. Jyothi and Chandorkar, {A. N.} and D. Misra",
note = "Funding Information: This study was supported by the Deutsche For-schungsgemeinschaft (Sonderforschungsbereich 320).; 7th International Symposium on High Dielectric Constant Materials and Gate Stacks - 216th Meeting of the Electrochemical Society ; Conference date: 05-10-2009 Through 07-10-2009",
year = "2009",
doi = "10.1149/1.3206623",
language = "English (US)",
isbn = "9781566777438",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "6",
pages = "241--246",
booktitle = "ECS Transactions - Physics and Technology of High-k Gate Dielectrics 7",
edition = "6",
}